JOURNAL ARTICLE
The structure design of piezoresistive pressure sensor based on MEMS
Yongjun ZhouWenman HanShuai ShiQiwei ZhangTao Guo
Year: 2020 Journal: Journal of Physics Conference Series Vol: 1650 (2)Pages: 022082-022082 Publisher: IOP Publishing
Abstract
Abstract This paper mainly designed the basic structure of the piezoresistive pressure sensor based on MEMS, analysed and optimized the structure size of the sensor, verified the rationality of the structure by finite element modelling. Through theoretical and optimization analysis, the main structural parameters of MEMS are determined.
Keywords:
Microelectromechanical systems Piezoresistive effect Finite element method Pressure sensor Materials science Electronic engineering Mechanical engineering Computer science Structural engineering Engineering Optoelectronics
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0.10
FWCI (Field Weighted Citation Impact)
8
Refs
0.45
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Citation History
Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Advanced Surface Polishing Techniques
Physical Sciences → Engineering → Biomedical Engineering
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