Hybrid Integration of High-Q Chalcogenide Microring Resonators on Silicon-on-insulator

Philippe Jean; Alexandre Douaud; Sophie LaRochelle; Younès Messaddeq; Wei Shi

doi:10.1364/cleo_si.2020.sth3o.3

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Hybrid Integration of High-Q Chalcogenide Microring Resonators on Silicon-on-insulator

Philippe Jean Alexandre Douaud Sophie LaRochelle Younès Messaddeq Wei Shi

Year: 2020 Journal: Conference on Lasers and Electro-Optics Vol: 4 Pages: STh3O.3-STh3O.3

DOI: 10.1364/cleo_si.2020.sth3o.3

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Abstract

We demonstrate novel on-chip chalcogenide microresonators directly inte grated on the silicon-on-insulator platform using an etchless fabrication method and thermal dewetting. A high Q greater than 4.6 × 10 5 is measured at telecommunication wavelengths.

Keywords:

Chalcogenide Dewetting Silicon on insulator Resonator Silicon Materials science Optoelectronics Fabrication Chalcogenide glass Wavelength Q factor Nanotechnology Thin film

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Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Optical Network Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Phase-change materials and chalcogenides

Physical Sciences → Materials Science → Materials Chemistry

Hybrid Integration of High-Q Chalcogenide Microring Resonators on Silicon-on-insulator

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