Synthesis of hard diamond-like carbon films by double-pulse high-power impulse magnetron sputtering

Takashi Kimura; Kento Sakai

doi:10.1016/j.diamond.2020.107996

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JOURNAL ARTICLE

Synthesis of hard diamond-like carbon films by double-pulse high-power impulse magnetron sputtering

Takashi Kimura Kento Sakai

Year: 2020 Journal: Diamond and Related Materials Vol: 108 Pages: 107996-107996 Publisher: Elsevier BV

DOI: 10.1016/j.diamond.2020.107996

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Keywords:

High-power impulse magnetron sputtering Materials science X-ray photoelectron spectroscopy Analytical Chemistry (journal) Sputter deposition Diamond-like carbon Plasma Sputtering Chemistry Thin film Nanotechnology Nuclear magnetic resonance Physics

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Topics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

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