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JOURNAL ARTICLE

Deposition of diamond-like carbon thin films by the high power impulse magnetron sputtering method

Artur Wiatrowski Wojciech Kijaszek W. M. Posadowski W. Oleszkiewicz J. Jadczak Piotr Kunicki

Year: 2017 Journal: Diamond and Related Materials Vol: 72 Pages: 71-76 Publisher: Elsevier BV

DOI: 10.1016/j.diamond.2017.01.007

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Keywords:

High-power impulse magnetron sputtering Materials science Sputter deposition Argon Sputtering Surface roughness Analytical Chemistry (journal) Diamond-like carbon Cavity magnetron Pulse duration Silicon Optoelectronics Thin film Optics Chemistry Composite material Laser Nanotechnology

Metrics

17

Cited By

0.93

FWCI (Field Weighted Citation Impact)

36

Refs

0.69

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Ion-surface interactions and analysis

Physical Sciences → Engineering → Computational Mechanics

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