Stable p-type nitrogen-doped zinc oxide films prepared by magnetron sputtering

J.Y. Chen; H.T. Zhang; Q. Chen; Faizan Husian; J.S. Cherng

doi:10.1016/j.vacuum.2020.109576

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Stable p-type nitrogen-doped zinc oxide films prepared by magnetron sputtering

J.Y. Chen H.T. Zhang Q. Chen Faizan Husian J.S. Cherng

Year: 2020 Journal: Vacuum Vol: 180 Pages: 109576-109576 Publisher: Elsevier BV

DOI: 10.1016/j.vacuum.2020.109576

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Keywords:

X-ray photoelectron spectroscopy Sputter deposition Materials science Sputtering Analytical Chemistry (journal) Electrical resistivity and conductivity Substrate (aquarium) Raman spectroscopy Zinc Doping Nitrogen Thin film Raman scattering Chemical engineering Chemistry Metallurgy Optoelectronics Nanotechnology Optics

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Ga2O3 and related materials

Physical Sciences → Materials Science → Electronic, Optical and Magnetic Materials

Stable p-type nitrogen-doped zinc oxide films prepared by magnetron sputtering

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