JOURNAL ARTICLE

Design and simulation of MEMS based capacitive pressure sensor for harsh environment

K. Srinivasa RaoB. Mohitha reddyV. Bala TejaG. V. S. KrishnatejaP. Ashok KumarKalyan Ramesh

Year: 2020 Journal:   Microsystem Technologies Vol: 26 (6)Pages: 1875-1880   Publisher: Springer Science+Business Media
Keywords:
Capacitive sensing Multiphysics Microelectromechanical systems Materials science Pressure sensor Dielectric Optoelectronics Silicon Substrate (aquarium) Proof mass Finite element method Electrical engineering Mechanical engineering Engineering

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15
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0.69
FWCI (Field Weighted Citation Impact)
15
Refs
0.69
Citation Normalized Percentile
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Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advanced Sensor and Energy Harvesting Materials
Physical Sciences →  Engineering →  Biomedical Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
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