Design and simulation of MEMS based capacitive pressure sensor for harsh environment

K. Srinivasa Rao; B. Mohitha reddy; V. Bala Teja; G. V. S. Krishnateja; P. Ashok Kumar; Kalyan Ramesh

doi:10.1007/s00542-019-04735-2

ScienceGate Book Chapters

JOURNAL ARTICLE

Design and simulation of MEMS based capacitive pressure sensor for harsh environment

K. Srinivasa Rao B. Mohitha reddy V. Bala Teja G. V. S. Krishnateja P. Ashok Kumar Kalyan Ramesh

Year: 2020 Journal: Microsystem Technologies Vol: 26 (6)Pages: 1875-1880 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-019-04735-2

Get Full-Text PDF Get Analytical Report

Keywords:

Capacitive sensing Multiphysics Microelectromechanical systems Materials science Pressure sensor Dielectric Optoelectronics Silicon Substrate (aquarium) Proof mass Finite element method Electrical engineering Mechanical engineering Engineering

Metrics

Cited By

0.69

FWCI (Field Weighted Citation Impact)

Refs

0.69

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Design and simulation of MEMS based capacitive pressure sensor for harsh environment

Metrics

Citation History

Topics

Related Documents

Wireless LTCC-based capacitive pressure sensor for harsh environment

Design and Simulation of MEMS-Based Two-Directional Capacitive Pressure Sensor

Silicon Carbide MEMS Capacitive Pressure Sensor for Harsh Environments

Design, Simulation and Analysis of MEMS Capacitive Pressure Sensor

Design and simulation of Tri-morph based MEMS thermal sensor for harsh environment