Wireless LTCC-based capacitive pressure sensor for harsh environment

Jijun Xiong; Ying Li; Yingping Hong; Binzhen Zhang; Tianhong Cui; Qiulin Tan; Shijun Zheng; Ting Liang

doi:10.1016/j.sna.2013.04.007

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Wireless LTCC-based capacitive pressure sensor for harsh environment

Jijun Xiong Ying Li Yingping Hong Binzhen Zhang Tianhong Cui Qiulin Tan Shijun Zheng Ting Liang

Year: 2013 Journal: Sensors and Actuators A Physical Vol: 197 Pages: 30-37 Publisher: Elsevier BV

DOI: 10.1016/j.sna.2013.04.007

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Keywords:

Capacitive sensing Fabrication Pressure sensor Sensitivity (control systems) Lamination Materials science Ceramic Wireless Electronic engineering Electrical engineering Screen printing Layer (electronics) Optoelectronics Engineering Mechanical engineering Telecommunications Nanotechnology Composite material

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Electrical and Thermal Properties of Materials

Physical Sciences → Engineering → Electrical and Electronic Engineering

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Ferroelectric and Piezoelectric Materials

Physical Sciences → Materials Science → Materials Chemistry

Wireless LTCC-based capacitive pressure sensor for harsh environment

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