JOURNAL ARTICLE

A MEMS based Fabry–Pérot accelerometer with high resolution

Minghui ZhaoKangli JiangHongwu BaiHairong WangXueyong Wei

Year: 2020 Journal:   Microsystem Technologies Vol: 26 (6)Pages: 1961-1969   Publisher: Springer Science+Business Media
Keywords:
Accelerometer Fabry–Pérot interferometer Microelectromechanical systems Cantilever Chip Materials science Interference (communication) Sensitivity (control systems) Demodulation Piezoresistive effect Optoelectronics Optics Electronic engineering Laser Electrical engineering Engineering Computer science Physics

Metrics

54
Cited By
4.85
FWCI (Field Weighted Citation Impact)
20
Refs
0.96
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Photonic and Optical Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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DISSERTATION

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