A MEMS based Fabry–Pérot accelerometer with high resolution

Minghui Zhao; Kangli Jiang; Hongwu Bai; Hairong Wang; Xueyong Wei

doi:10.1007/s00542-020-04747-3

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JOURNAL ARTICLE

A MEMS based Fabry–Pérot accelerometer with high resolution

Minghui Zhao Kangli Jiang Hongwu Bai Hairong Wang Xueyong Wei

Year: 2020 Journal: Microsystem Technologies Vol: 26 (6)Pages: 1961-1969 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-020-04747-3

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Keywords:

Accelerometer Fabry–Pérot interferometer Microelectromechanical systems Cantilever Chip Materials science Interference (communication) Sensitivity (control systems) Demodulation Piezoresistive effect Optoelectronics Optics Electronic engineering Laser Electrical engineering Engineering Computer science Physics

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Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

A MEMS based Fabry–Pérot accelerometer with high resolution

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