JOURNAL ARTICLE
Fiber Fabry-Pérot Accelerometer Based on SU-8 Photoresist
尤晶晶 You Jingjing王鸣 Wang Ming戎华 Rong Hua戴丽华 Dai Lihua
Year: 2013 Journal: Acta Optica Sinica Vol: 33 (8)Pages: 0806002-0806002
Keywords:
Photoresist Fabry–Pérot interferometer Accelerometer Materials science Fiber Optical fiber Optics Composite material Optoelectronics Computer science Physics
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Topics
Advanced MEMS and NEMS Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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