Comprehensive analysis of blue diode laser-annealing of amorphous silicon films

Minok Park; Zacharias Vangelatos; Yoonsoo Rho; H.K. Park; Jin Jang; Costas P. Grigoropoulos

doi:10.1016/j.tsf.2019.137779

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Comprehensive analysis of blue diode laser-annealing of amorphous silicon films

Minok Park Zacharias Vangelatos Yoonsoo Rho H.K. Park Jin Jang Costas P. Grigoropoulos

Year: 2019 Journal: Thin Solid Films Vol: 696 Pages: 137779-137779 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2019.137779

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Keywords:

Materials science Polycrystalline silicon Silicon Optoelectronics Thin film Amorphous silicon Annealing (glass) Raman spectroscopy Scanning electron microscope Diode Amorphous solid Laser Optics Composite material Crystalline silicon Nanotechnology Thin-film transistor Crystallography Chemistry

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Phase-change materials and chalcogenides

Physical Sciences → Materials Science → Materials Chemistry

Comprehensive analysis of blue diode laser-annealing of amorphous silicon films

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