JOURNAL ARTICLE

On the cause of a double hysteresis during reactive magnetron sputtering

Koen StrijckmansR. SchelfhoutDiederik Depla

Year: 2017 Journal:   Ghent University Academic Bibliography (Ghent University)   Publisher: Ghent University
Keywords:
Hysteresis Materials science Sputtering Sputter deposition High-power impulse magnetron sputtering Cavity magnetron Metallurgy Physics Condensed matter physics Nanotechnology Thin film

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Citation History

Topics

Advanced Materials Characterization Techniques
Physical Sciences →  Engineering →  Biomedical Engineering
Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
nanoparticles nucleation surface interactions
Physical Sciences →  Earth and Planetary Sciences →  Atmospheric Science

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