JOURNAL ARTICLE
ChemInform Abstract: NOVEL PASSIVATION DIELECTRICS ‐ THE BORON‐ OR PHOSPHORUS‐DOPED HYDROGENATED AMORPHOUS SILICON CARBIDE FILMS
C. Y. ChangY.K. FangCheng-Yi HuangB. S. Wu
Year: 1985 Journal: Chemischer Informationsdienst Vol: 16 (23) Publisher: Wiley
Abstract
Abstract The Boron‐ or Phosphoms‐Doped Hydrogenated Amorphous Silicon Carbide Films.
Keywords:
Amorphous silicon Materials science Passivation Doping Boron Silicon carbide Amorphous solid Nanocrystalline silicon Chemical engineering Dielectric Silicon Optoelectronics Nanotechnology Metallurgy Chemistry Crystalline silicon Crystallography Organic chemistry Layer (electronics)
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Topics
Advanced ceramic materials synthesis
Physical Sciences → Materials Science → Ceramics and Composites
Gas Sensing Nanomaterials and Sensors
Physical Sciences → Engineering → Electrical and Electronic Engineering
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
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