JOURNAL ARTICLE

Phosphorus- and boron-doped hydrogenated amorphous silicon films prepared using vaporized liquid cyclopentasilane

Keywords:
Vaporization Substrate (aquarium) Silicon Deposition (geology) Materials science Amorphous solid Amorphous silicon Doping Dissolution Chemical vapor deposition Boron Chemical engineering Analytical Chemistry (journal) Decaborane Chemistry Crystalline silicon Nanotechnology Metallurgy Organic chemistry Optoelectronics

Metrics

20
Cited By
1.34
FWCI (Field Weighted Citation Impact)
37
Refs
0.85
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Thin-Film Transistor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Silicon Nanostructures and Photoluminescence
Physical Sciences →  Materials Science →  Materials Chemistry
Silicon and Solar Cell Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering

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