JOURNAL ARTICLE
Anodic Etching of III-V Compound Semiconductors
Year: 2018 Journal: Journal of The Surface Finishing Society of Japan Vol: 69 (12)Pages: 633-636 Publisher: The Surface Finishing Society of Japan
Keywords:
Compound semiconductor Materials science Etching (microfabrication) Semiconductor Anode Optoelectronics Nanotechnology Metallurgy Chemistry Epitaxy Physical chemistry Layer (electronics) Electrode
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Topics
Semiconductor materials and devices
Physical Sciences → Engineering → Electrical and Electronic Engineering
Semiconductor materials and interfaces
Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics
Anodic Oxide Films and Nanostructures
Physical Sciences → Materials Science → Materials Chemistry
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