JOURNAL ARTICLE

Anodic Etching of III-V Compound Semiconductors

Hidetaka AsohSachiko Ono

Year: 2018 Journal:   Journal of The Surface Finishing Society of Japan Vol: 69 (12)Pages: 633-636   Publisher: The Surface Finishing Society of Japan
Keywords:
Compound semiconductor Materials science Etching (microfabrication) Semiconductor Anode Optoelectronics Nanotechnology Metallurgy Chemistry Epitaxy Physical chemistry Layer (electronics) Electrode

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Topics

Semiconductor materials and devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Semiconductor materials and interfaces
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Anodic Oxide Films and Nanostructures
Physical Sciences →  Materials Science →  Materials Chemistry

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