Optical characterization of MoS₂ sputtered thin films

Abstract

Abstract We studied on the crystallinity of as-sputtered and annealed MoS 2 thin films by Raman scattering. The samples were prepared by RF magnetron sputtering, and the thermal annealing was carried out under sulfurous atmosphere. Although as-sputtered MoS 2 thin films clearly showed the deterioration of the lattice ordering, it was drastically improved by the thermal annealing due to the sulfurization of the sample. And since the sulfurization occurred remarkably on the top surface of MoS 2 sputtered thin films, it was expected to be an effective method to realize a few-layer MoS 2 sputtered thin films with high crystallinity.