Optical Studies of Reactively Sputtered CuGaO₂Thin Films

Abstract

CuGaO2 thin films were investigated for their optical properties in this paper. The CuGaO2 thin films were prepared by radio frequency magnetron sputtering system using a CuGaO2 sputtering target. The deposition studies along with the effects of annealing in different ambience like air and oxygen respectively are presented in this paper. The transmission of the films were noted to reduce with increasing temperatures of annealing in both oxygen and air ambient. The optical bandgaps of the CuGaO2 films, both annealed and as deposited were found to range from 3.2 - 3.4 eV.