Research on integrated readout circuit of temperature, humidity and pressure sensor

Abstract

Nowadays, the use of multiple sensors for environmental detection could overcome the uncertainty and limitations of a single detector. Micro-integrated sensors composed of multiple sensors have become the development trend of future sensors. This paper describes the implementation of a multi-sensor signal processing circuit. By monitoring external signals through temperature sensor, humidity sensor, and pressure sensor, the physical quantity of sensors is converted into a digital signal output by integrated readout Circuit. And a novel switched capacitor circuit is proposed. In this paper ,the readout circuit designed on a 0.5μm typical process, the sensitivity of temperature is less than 0.5°C, the accuracy of on-chip ADC is 14bit, and the overall power consumption is less than 20mW. It lays the foundation for multi-sensor composite integration and miniaturization research.