JOURNAL ARTICLE

Capacitive pressure sensor with monolithically integrated CMOS readout circuit for high temperature applications

Klaus KastenNorbert KordasHolger KappertW. Mokwa

Year: 2002 Journal:   Sensors and Actuators A Physical Vol: 97-98 Pages: 83-87   Publisher: Elsevier BV
Keywords:
Capacitive sensing Linearity CMOS Materials science Temperature coefficient Offset (computer science) Optoelectronics Compensation (psychology) Temperature measurement Electrical engineering Calibration Pressure sensor Dynamic range Electronic engineering Computer science Engineering Physics

Metrics

38
Cited By
2.19
FWCI (Field Weighted Citation Impact)
6
Refs
0.88
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Innovative Energy Harvesting Technologies
Physical Sciences →  Engineering →  Mechanical Engineering
Advanced Sensor and Energy Harvesting Materials
Physical Sciences →  Engineering →  Biomedical Engineering
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