Capacitive pressure sensor with monolithically integrated CMOS readout circuit for high temperature applications

Klaus Kasten; Norbert Kordas; Holger Kappert; W. Mokwa

doi:10.1016/s0924-4247(01)00799-3

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Capacitive pressure sensor with monolithically integrated CMOS readout circuit for high temperature applications

Klaus Kasten Norbert Kordas Holger Kappert W. Mokwa

Year: 2002 Journal: Sensors and Actuators A Physical Vol: 97-98 Pages: 83-87 Publisher: Elsevier BV

DOI: 10.1016/s0924-4247(01)00799-3

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Keywords:

Capacitive sensing Linearity CMOS Materials science Temperature coefficient Offset (computer science) Optoelectronics Compensation (psychology) Temperature measurement Electrical engineering Calibration Pressure sensor Dynamic range Electronic engineering Computer science Engineering Physics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Innovative Energy Harvesting Technologies

Physical Sciences → Engineering → Mechanical Engineering

Advanced Sensor and Energy Harvesting Materials

Physical Sciences → Engineering → Biomedical Engineering

Capacitive pressure sensor with monolithically integrated CMOS readout circuit for high temperature applications

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