BOOK-CHAPTER
Nano-pattern Formation Using Liquid Silicon
Keywords:
Silicon Materials science Nanotechnology Fabrication Chemical vapor deposition Focused ion beam Nano- Ion beam Deposition (geology) Electron beam physical vapor deposition Optoelectronics Ion Chemistry Composite material Organic chemistry
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Topics
Nanofabrication and Lithography Techniques
Physical Sciences → Engineering → Biomedical Engineering
Nanowire Synthesis and Applications
Physical Sciences → Engineering → Biomedical Engineering
Ion-surface interactions and analysis
Physical Sciences → Engineering → Computational Mechanics
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