Electromechanical modelling of electrostatically actuated beams

S. Lakshmi; P. A. Dinesh; C. S. Pratheeksha

doi:10.1007/s00542-018-4170-1

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Electromechanical modelling of electrostatically actuated beams

S. Lakshmi P. A. Dinesh C. S. Pratheeksha

Year: 2018 Journal: Microsystem Technologies Vol: 25 (7)Pages: 2805-2812 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-018-4170-1

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Keywords:

Microelectromechanical systems Beam (structure) Galerkin method Voltage Displacement (psychology) Euler's formula Timoshenko beam theory Cantilever Mechanical engineering Computer science Structural engineering Materials science Finite element method Mathematics Engineering Mathematical analysis Nanotechnology Electrical engineering

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

Electromechanical modelling of electrostatically actuated beams

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