Microfabrication Techniques using a Femtosecond Laser for Fabrication of High Precision Optical Components

JOURNAL ARTICLE

Year: 2018 Pages: 407-410

DOI: 10.3850/978-981-11-2728-1_54

Keywords:

Microfabrication Femtosecond Fabrication Materials science Laser Optoelectronics Laser beam machining Laser beams Optics Physics

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Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Advanced Surface Polishing Techniques

Physical Sciences → Engineering → Biomedical Engineering

Nanofabrication and Lithography Techniques

Physical Sciences → Engineering → Biomedical Engineering