MEMS Microhotplates for Chemical Sensors

Abstract

In this paper, we design and develop low-power MEMS based microhotplates for chemiresistive gas sensors using computer modelling and microelectronic technologies, respectively. Two geometrical designs of supporting beams of suspended membranes were designed and simulated to evaluate displacement in the structure. Two different patterns of heating elements were designed, and the power consumption was calculated. Fabricated structures are studied and compared with the theoretical data obtained from simulations.