High-Speed, High-Sensitivity Polyimide Humidity Sensors Based on MEMS Microhotplates

Jea Sung Kim; Tea Jin Kim; Moon Sik Kang; Kum-Pyo Yoo; Nam Ki Min

doi:10.1557/proc-1075-j07-04

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High-Speed, High-Sensitivity Polyimide Humidity Sensors Based on MEMS Microhotplates

Jea Sung Kim Tea Jin Kim Moon Sik Kang Kum-Pyo Yoo Nam Ki Min

Year: 2008 Journal: MRS Proceedings Vol: 1075 Publisher: Cambridge University Press

DOI: 10.1557/proc-1075-j07-04

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Keywords:

Polyimide Materials science Humidity Microelectromechanical systems Composite material Hysteresis Capacitive sensing Sensitivity (control systems) Relative humidity Optoelectronics Electronic engineering Layer (electronics) Electrical engineering Meteorology

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Chemical and Physical Properties of Materials

Physical Sciences → Materials Science → Materials Chemistry

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

High-Speed, High-Sensitivity Polyimide Humidity Sensors Based on MEMS Microhotplates

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