JOURNAL ARTICLE

High-Speed, High-Sensitivity Polyimide Humidity Sensors Based on MEMS Microhotplates

Keywords:
Polyimide Materials science Humidity Microelectromechanical systems Composite material Hysteresis Capacitive sensing Sensitivity (control systems) Relative humidity Optoelectronics Electronic engineering Layer (electronics) Electrical engineering Meteorology

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Citation History

Topics

Gas Sensing Nanomaterials and Sensors
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Chemical and Physical Properties of Materials
Physical Sciences →  Materials Science →  Materials Chemistry
Photonic and Optical Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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