Substrate and annealing temperature dependent electrical resistivity of sputtered titanium nitride thin films

Brian Kearney; Battogtokh Jugdersuren; J. C. Culbertson; Paul A. DeSario; Xiao Liu

doi:10.1016/j.tsf.2018.07.001

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Substrate and annealing temperature dependent electrical resistivity of sputtered titanium nitride thin films

Brian Kearney Battogtokh Jugdersuren J. C. Culbertson Paul A. DeSario Xiao Liu

Year: 2018 Journal: Thin Solid Films Vol: 661 Pages: 78-83 Publisher: Elsevier BV

DOI: 10.1016/j.tsf.2018.07.001

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Keywords:

Electrical resistivity and conductivity Materials science Temperature coefficient Annealing (glass) Thin film Sputter deposition Analytical Chemistry (journal) Sputtering Nitride Titanium Raman spectroscopy Composite material Metallurgy Chemistry Nanotechnology Optics

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Substrate and annealing temperature dependent electrical resistivity of sputtered titanium nitride thin films

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