JOURNAL ARTICLE

Substrate-temperature dependent structure and composition variations in RF magnetron sputtered titanium nitride thin films

Kuraganti VasuM. Ghanashyam KrishnaK. A. Padmanabhan

Year: 2010 Journal:   Applied Surface Science Vol: 257 (7)Pages: 3069-3074   Publisher: Elsevier BV
Keywords:
Materials science Thin film Substrate (aquarium) Sputter deposition Tetragonal crystal system Cavity magnetron Optoelectronics Atmospheric temperature range Analytical Chemistry (journal) Sputtering Transmittance Titanium nitride Titanium Nitride Crystal structure Layer (electronics) Metallurgy Composite material Crystallography Nanotechnology Chemistry

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59
Cited By
5.15
FWCI (Field Weighted Citation Impact)
36
Refs
0.95
Citation Normalized Percentile
Is in top 1%
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Citation History

Topics

Metal and Thin Film Mechanics
Physical Sciences →  Engineering →  Mechanics of Materials
GaN-based semiconductor devices and materials
Physical Sciences →  Physics and Astronomy →  Condensed Matter Physics
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
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