JOURNAL ARTICLE
Substrate-temperature dependent structure and composition variations in RF magnetron sputtered titanium nitride thin films
Kuraganti VasuM. Ghanashyam KrishnaK. A. Padmanabhan
Year: 2010 Journal: Applied Surface Science Vol: 257 (7)Pages: 3069-3074 Publisher: Elsevier BV
Keywords:
Materials science Thin film Substrate (aquarium) Sputter deposition Tetragonal crystal system Cavity magnetron Optoelectronics Atmospheric temperature range Analytical Chemistry (journal) Sputtering Transmittance Titanium nitride Titanium Nitride Crystal structure Layer (electronics) Metallurgy Composite material Crystallography Nanotechnology Chemistry
Metrics
59
Cited By
5.15
FWCI (Field Weighted Citation Impact)
36
Refs
0.95
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Metal and Thin Film Mechanics
Physical Sciences → Engineering → Mechanics of Materials
GaN-based semiconductor devices and materials
Physical Sciences → Physics and Astronomy → Condensed Matter Physics
Acoustic Wave Resonator Technologies
Physical Sciences → Engineering → Biomedical Engineering
Related Documents
JOURNAL ARTICLE
Substrate and annealing temperature dependent electrical resistivity of sputtered titanium nitride thin films
Brian KearneyBattogtokh JugdersurenJ. C. CulbertsonPaul A. DeSarioXiao Liu
Journal: Thin Solid Films Year: 2018 Vol: 661 Pages: 78-83
JOURNAL ARTICLE
Magnetron sputtered titanium nitride thin films on thermoplastic polymers
E. LugscheiderS. BärwulfM. RiesterH. Hilgers
Journal: Surface and Coatings Technology Year: 1999 Vol: 116-119 Pages: 1172-1178
JOURNAL ARTICLE
Sputtering-Pressure Dependent Optical and Microstructural Properties Variations in DC Reactive Magnetron Sputtered Titanium Nitride Thin Films
Emmanuel AjenifujaA.Y. FasasiG.A. Osinkolu
Journal: Transactions of the Indian Ceramic Society Year: 2012 Vol: 71 (4)Pages: 181-188
JOURNAL ARTICLE
Deposition temperature dependent characteristics of magnetron sputtered chromium nitride films
T. KacsichMatthias NeubauerU. GeyerKarl‐Heinrich BaumannFranck RoseM. Uhrmacher
Journal: Journal of Physics D Applied Physics Year: 1995 Vol: 28 (2)Pages: 424-431
JOURNAL ARTICLE
Anisotropies in magnetron sputtered carbon nitride thin films
Niklas HellgrenMats JohanssonEsteban BroitmanLars HultmanJ.‐E. Sundgren
Journal: Applied Physics Letters Year: 2001 Vol: 78 (18)Pages: 2703-2705