BOOK-CHAPTER

Investigation of the Growth of 3C-SiC and 6H-SiC Films on Low-Tilt-Angle Vicinal (0001) 6H-SiC Wafers

Keywords:
Vicinal Materials science Wafer Nucleation Epitaxy Substrate (aquarium) Stacking fault Stacking Chemical vapor deposition Optoelectronics Tilt (camera) Crystallography Nanotechnology Composite material Chemistry Dislocation Geometry Layer (electronics)

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7
Cited By
7.21
FWCI (Field Weighted Citation Impact)
16
Refs
0.97
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Is in top 1%
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Citation History

Topics

Silicon Carbide Semiconductor Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Copper Interconnects and Reliability
Physical Sciences →  Materials Science →  Electronic, Optical and Magnetic Materials
Electromagnetic Compatibility and Noise Suppression
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
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