Fabrication of three-dimensional photonic crystals by holographic lithography

Yuzo Ono; Kiyokatsu Ikemoto

doi:10.1364/domo.2002.dwb5

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Fabrication of three-dimensional photonic crystals by holographic lithography

Yuzo Ono Kiyokatsu Ikemoto

Year: 2002 Journal: Diffractive Optics and Micro-Optics Pages: DWB5-DWB5

DOI: 10.1364/domo.2002.dwb5

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Abstract

Three-dimensional photonic crystals have been successfully fabricated in a photoresist by four-wave interference, where incident wave directions were set by considering the equation for interference fringe and that between lattice and reciprocal lattice vectors.

Keywords:

Photoresist Holography Photonic crystal Fabrication Lithography Interference lithography Reciprocal lattice Materials science Optics Interference (communication) Photonics Lattice (music) Photolithography Optoelectronics Resist Diffraction Physics Nanotechnology Computer science Telecommunications

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Topics

Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Fabrication of three-dimensional photonic crystals by holographic lithography

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