Tunable optical properties of co-sputtered Ti-SiO_2 nanocomposite thin films

Abstract

In this work, optical constants of direct current (DC) and radio frequency (RF) co-sputtered Ti-SiO2 nanocomposite thin films were investigated and tuned by controlling the deposition power of Ti in the SiO2 host matrix. X-ray photoelectron spectroscopy (XPS) results confirmed that the metallic Ti was completely oxidized into different titanium oxide states while the Si4+ state was reduced to the Si2+ or Si0 state by observing the Ti 2p, O 1s and Si 2p line shapes changing under different deposition conditions. The optical constants of the composites were characterized with a spectroscopic ellipsometer (SE) and reduced by using the modified harmonic oscillator approximation (HOA) model. The results show that the metal-dielectric nanocomposite will have an advantage over natural materials because its optical properties of n and k can be properly tuned by adjusting the concentration of Ti in the Ti-SiO2 nanocomposites, thus satisfying the requirements of photonic device design and applications in broad spectral regions.