Reactively sputtered Ti–B–N nanocomposite films: correlation between structure and optical properties

J.F. Pierson; E. Tomasella; Ph. Bauer

doi:10.1016/s0040-6090(02)00071-8

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Reactively sputtered Ti–B–N nanocomposite films: correlation between structure and optical properties

J.F. Pierson E. Tomasella Ph. Bauer

Year: 2002 Journal: Thin Solid Films Vol: 408 (1-2)Pages: 26-32 Publisher: Elsevier BV

DOI: 10.1016/s0040-6090(02)00071-8

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Keywords:

Materials science Nanocomposite Boron nitride Amorphous solid Tin Titanium nitride Titanium diboride Coating Nitride Analytical Chemistry (journal) Volumetric flow rate Titanium Sputtering Boron Chemical engineering Composite material Nanotechnology Thin film Metallurgy Crystallography Layer (electronics) Chemistry Ceramic Organic chemistry

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Boron and Carbon Nanomaterials Research

Physical Sciences → Materials Science → Materials Chemistry

Reactively sputtered Ti–B–N nanocomposite films: correlation between structure and optical properties

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