Microstructure and mechanical properties of reactively sputtered Ti–Si–N nanocomposite films

Fanghua Mei; Nan Shao; Xiao Hu; Geyang Li; Mingyuan Gu

doi:10.1016/j.matlet.2005.03.019

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JOURNAL ARTICLE

Microstructure and mechanical properties of reactively sputtered Ti–Si–N nanocomposite films

Fanghua Mei Nan Shao Xiao Hu Geyang Li Mingyuan Gu

Year: 2005 Journal: Materials Letters Vol: 59 (19-20)Pages: 2442-2445 Publisher: Elsevier BV

DOI: 10.1016/j.matlet.2005.03.019

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Keywords:

Materials science Microstructure Nanoindentation Nanocomposite Sputtering Composite material Grain size Transmission electron microscopy Tin Interphase Elastic modulus Thin film Metallurgy Nanotechnology

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Advanced ceramic materials synthesis

Physical Sciences → Materials Science → Ceramics and Composites

Microstructure and mechanical properties of reactively sputtered Ti–Si–N nanocomposite films

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