Ultra-High Sensitivity Humidity Sensor Based on MoS₂/Ag Composite Films

Abstract

Novel capacitance-type humidity sensors based on MoS ₂ /Ag composite films with a simple preparation method were proposed. The sensing characteristics of sensors against relative humidity were investigated, and the test results demonstrated that the humidity sensitivity of the MoS ₂ /Ag-based sensors was significantly Enhanced, which is ten times that of the pure MoS ₂ -based humidity sensors. Meanwhile, this kind of sensors exhibited fast response speed capable of detecting the human breath. Furthermore, complex impedance spectroscopy was discussed to understand the sensing mechanisms of MoS ₂ /Ag-based sensors.