JOURNAL ARTICLE

High Aspect Ratio Silicon Etch

Banqiu Wu

Year: 2012 Journal:   ECS Meeting Abstracts Vol: MA2012-02 (34)Pages: 2720-2720   Publisher: Institute of Physics

Abstract

Abstract not Available.

Keywords:
Silicon Materials science Aspect ratio (aeronautics) Nanotechnology Engineering physics Optoelectronics Engineering

Metrics

4
Cited By
0.66
FWCI (Field Weighted Citation Impact)
0
Refs
0.76
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Advancements in Semiconductor Devices and Circuit Design
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
VLSI and Analog Circuit Testing
Physical Sciences →  Computer Science →  Hardware and Architecture

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