JOURNAL ARTICLE
High Aspect Ratio Silicon Etch
Year: 2012 Journal: ECS Meeting Abstracts Vol: MA2012-02 (34)Pages: 2720-2720 Publisher: Institute of Physics
Abstract
Abstract not Available.
Keywords:
Silicon Materials science Aspect ratio (aeronautics) Nanotechnology Engineering physics Optoelectronics Engineering
Metrics
4
Cited By
0.66
FWCI (Field Weighted Citation Impact)
0
Refs
0.76
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Citation History
Topics
Integrated Circuits and Semiconductor Failure Analysis
Physical Sciences → Engineering → Electrical and Electronic Engineering
Advancements in Semiconductor Devices and Circuit Design
Physical Sciences → Engineering → Electrical and Electronic Engineering
VLSI and Analog Circuit Testing
Physical Sciences → Computer Science → Hardware and Architecture
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