JOURNAL ARTICLE

Pulsed femtosecond-laser Machining and deep reactive ion etching of diamond

Thomas WulzBrian K. CanfieldLloyd M. DavisS. SpanierEric Lukosi

Year: 2017 Journal:   Diamond and Related Materials Vol: 74 Pages: 108-113   Publisher: Elsevier BV
Keywords:
Diamond Materials science Femtosecond Raman spectroscopy Laser Graphite Etching (microfabrication) Reactive-ion etching Isotropic etching Chemical vapor deposition Crystal (programming language) Analytical Chemistry (journal) Optoelectronics Optics Nanotechnology Chemistry Composite material

Metrics

10
Cited By
0.58
FWCI (Field Weighted Citation Impact)
33
Refs
0.60
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Diamond and Carbon-based Materials Research
Physical Sciences →  Materials Science →  Materials Chemistry
Laser Material Processing Techniques
Physical Sciences →  Engineering →  Computational Mechanics
Laser-induced spectroscopy and plasma
Physical Sciences →  Engineering →  Mechanics of Materials
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