Pulsed femtosecond-laser Machining and deep reactive ion etching of diamond

Thomas Wulz; Brian K. Canfield; Lloyd M. Davis; S. Spanier; Eric Lukosi

doi:10.1016/j.diamond.2017.02.018

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Pulsed femtosecond-laser Machining and deep reactive ion etching of diamond

Thomas Wulz Brian K. Canfield Lloyd M. Davis S. Spanier Eric Lukosi

Year: 2017 Journal: Diamond and Related Materials Vol: 74 Pages: 108-113 Publisher: Elsevier BV

DOI: 10.1016/j.diamond.2017.02.018

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Keywords:

Diamond Materials science Femtosecond Raman spectroscopy Laser Graphite Etching (microfabrication) Reactive-ion etching Isotropic etching Chemical vapor deposition Crystal (programming language) Analytical Chemistry (journal) Optoelectronics Optics Nanotechnology Chemistry Composite material

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Laser-induced spectroscopy and plasma

Physical Sciences → Engineering → Mechanics of Materials

Pulsed femtosecond-laser Machining and deep reactive ion etching of diamond

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