Pulsed Femtosecond Excimer Laser-Induced Chemically Clean Etching of Diamond

Ajay P. Malshe; A. M. Ozkan; T. A. Railkar; Pal Molian; W.D. Brown

doi:10.1557/proc-526-123

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Pulsed Femtosecond Excimer Laser-Induced Chemically Clean Etching of Diamond

Ajay P. Malshe A. M. Ozkan T. A. Railkar Pal Molian W.D. Brown

Year: 1998 Journal: MRS Proceedings Vol: 526 Publisher: Cambridge University Press

DOI: 10.1557/proc-526-123

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Keywords:

Materials science Femtosecond Excimer laser Diamond Laser Raman spectroscopy Graphite Excimer Etching (microfabrication) Irradiation Amorphous carbon Nanosecond Optoelectronics Metastability Optics Nanotechnology Composite material Layer (electronics)

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Laser Material Processing Techniques

Physical Sciences → Engineering → Computational Mechanics

Nonlinear Optical Materials Studies

Physical Sciences → Engineering → Biomedical Engineering

Pulsed Femtosecond Excimer Laser-Induced Chemically Clean Etching of Diamond

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