Structural and Optical Characteristics of Zn-Rich In2O3–SnO2–ZnO (ITZO) Thin Films Prepared by Radio Frequency Magnetron Sputtering

Jung–A Lee; Young-Woo Heo; Joon‐Hyung Lee; Hee Young Lee; Jeong-Joo Kim

doi:10.1166/jno.2017.2054

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Structural and Optical Characteristics of Zn-Rich In₂O₃–SnO₂–ZnO (ITZO) Thin Films Prepared by Radio Frequency Magnetron Sputtering

Jung–A Lee Young-Woo Heo Joon‐Hyung Lee Hee Young Lee Jeong-Joo Kim

Year: 2017 Journal: Journal of Nanoelectronics and Optoelectronics Vol: 12 (6)Pages: 598-601 Publisher: American Scientific Publishers

DOI: 10.1166/jno.2017.2054

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Keywords:

Materials science Sputter deposition Thin film Sputtering Optoelectronics Cavity magnetron Nanotechnology

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Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Transition Metal Oxide Nanomaterials

Physical Sciences → Materials Science → Polymers and Plastics

Structural and Optical Characteristics of Zn-Rich In₂O₃–SnO₂–ZnO (ITZO) Thin Films Prepared by Radio Frequency Magnetron Sputtering

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