Texture Analysis of Thin In<sub>2</sub>O<sub>3</sub>:Sn Films Prepared by Direct-current and Radio-frequency Magnetron-sputtering

Dieter Mergel; Karola Thiele; Zhaohui Qiao

doi:10.1557/jmr.2005.0297

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Texture Analysis of Thin In₂O₃:Sn Films Prepared by Direct-current and Radio-frequency Magnetron-sputtering

Dieter Mergel Karola Thiele Zhaohui Qiao

Year: 2005 Journal: Journal of materials research/Pratt's guide to venture capital sources Vol: 20 (9)Pages: 2503-2509 Publisher: Springer Nature

DOI: 10.1557/jmr.2005.0297

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Keywords:

Materials science Texture (cosmology) Pole figure Sputter deposition Diffraction Sputtering Optics Position (finance) Analytical Chemistry (journal) Orientation (vector space) Radio frequency Thin film Physics Geometry Telecommunications Image (mathematics) Nanotechnology

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ZnO doping and properties

Physical Sciences → Materials Science → Materials Chemistry

Transition Metal Oxide Nanomaterials

Physical Sciences → Materials Science → Polymers and Plastics

Gas Sensing Nanomaterials and Sensors

Physical Sciences → Engineering → Electrical and Electronic Engineering

Texture Analysis of Thin In₂O₃:Sn Films Prepared by Direct-current and Radio-frequency Magnetron-sputtering

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