Optical properties of cubic and monoclinic Y2O3 films prepared through radio frequency magnetron sputtering

Chenyi Hua; Chengming Li; Jianchao Guo; Xiongbo Yan; Jinlong Liu; Liangxian Chen; Junjun Wei; L.F. Hei

doi:10.1016/j.surfcoat.2017.01.004

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Optical properties of cubic and monoclinic Y2O3 films prepared through radio frequency magnetron sputtering

Chenyi Hua Chengming Li Jianchao Guo Xiongbo Yan Jinlong Liu Liangxian Chen Junjun Wei L.F. Hei

Year: 2017 Journal: Surface and Coatings Technology Vol: 320 Pages: 279-283 Publisher: Elsevier BV

DOI: 10.1016/j.surfcoat.2017.01.004

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Keywords:

Monoclinic crystal system Materials science Sputter deposition Diamond Grain size Sputtering Optics Cavity magnetron Analytical Chemistry (journal) Thin film Crystallography Nanotechnology Composite material Crystal structure Chemistry Physics

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Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

High-pressure geophysics and materials

Physical Sciences → Earth and Planetary Sciences → Geophysics

Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Optical properties of cubic and monoclinic Y2O3 films prepared through radio frequency magnetron sputtering

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