Subwavelength Grating Structure with High Aspect Ratio and Tapered Sidewall Profiles

Wenxi Yu; Dong Wu; Xiaofeng Duan; Ya Yi

doi:10.1557/adv.2015.32

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JOURNAL ARTICLE

Subwavelength Grating Structure with High Aspect Ratio and Tapered Sidewall Profiles

Wenxi Yu Dong Wu Xiaofeng Duan Ya Yi

Year: 2015 Journal: MRS Advances Vol: 1 (23)Pages: 1693-1701 Publisher: Springer Science+Business Media

DOI: 10.1557/adv.2015.32

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Keywords:

Grating Materials science Guided-mode resonance Photonics Fabrication Optics Resonance (particle physics) Optoelectronics Diffraction grating Blazed grating Etching (microfabrication) Laser Nanotechnology Physics

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Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Photonic Crystals and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Subwavelength Grating Structure with High Aspect Ratio and Tapered Sidewall Profiles

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