Impacts of tapered sidewall profiles with high aspect ratio on subwavelength grating structure

Wenxi Yu; Dachuan Wu; Ya Yi

doi:10.1109/ipcon.2015.7323730

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Impacts of tapered sidewall profiles with high aspect ratio on subwavelength grating structure

Wenxi Yu Dachuan Wu Ya Yi

Year: 2015 Pages: 166-167

DOI: 10.1109/ipcon.2015.7323730

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Abstract

We have numerically demonstrated the significant impacts on the resonance mode characteristics of subwavelength grating structures due to tapered sidewall profile and high aspect ratio, which is normally obtained from CMOS-compatible nanoelectronic fabrication processes.

Keywords:

Fabrication Grating Materials science Aspect ratio (aeronautics) Resonance (particle physics) Optoelectronics Diffraction grating Optics CMOS Physics

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Optical Coatings and Gratings

Physical Sciences → Materials Science → Surfaces, Coatings and Films

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Near-Field Optical Microscopy

Physical Sciences → Engineering → Biomedical Engineering

Impacts of tapered sidewall profiles with high aspect ratio on subwavelength grating structure

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