MEMS Sensors and Actuators

BOOK-CHAPTER

Year: 2005 Mechanical engineering Pages: 273-337 Publisher: CRC Press

DOI: 10.1201/9781420027754.ch8

Keywords:

Microelectromechanical systems Actuator Materials science Computer science Engineering Nanotechnology Electrical engineering

Metrics

Cited By

0.66

FWCI (Field Weighted Citation Impact)

Refs

0.73

Citation Normalized Percentile

Is in top 1%

Is in top 10%

Sensor Technology and Measurement Systems

Physical Sciences → Computer Science → Computer Networks and Communications

Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering