BOOK-CHAPTER
FORMATION OF POROUS SILICON NANOSTRUCTURES BY METAL-ASSISTED CHEMICAL ETCHING
Stanislau NiauzorauKseniya GirelL. DolgyiВ. А. Бондаренко
Year: 2015 WORLD SCIENTIFIC eBooks Pages: 365-368 Publisher: World Scientific
Keywords:
Porous silicon Materials science Etching (microfabrication) Nanotechnology Isotropic etching Nanostructure Silicon Metal Porosity Chemical engineering Metallurgy Composite material Engineering Layer (electronics)
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Topics
Silicon Nanostructures and Photoluminescence
Physical Sciences → Materials Science → Materials Chemistry
Laser-Ablation Synthesis of Nanoparticles
Physical Sciences → Engineering → Biomedical Engineering
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