Vertical silicon nanostructures via metal-assisted chemical etching

Seyeong Lee; Dong‐Hee Kang; Seong‐Min Kim; Myung‐Han Yoon

doi:10.1201/9781315153551-9

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Vertical silicon nanostructures via metal-assisted chemical etching

Seyeong Lee Dong‐Hee Kang Seong‐Min Kim Myung‐Han Yoon

Year: 2017 Series in materials science and engineering Pages: 169-192

DOI: 10.1201/9781315153551-9

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Keywords:

Materials science Isotropic etching Etching (microfabrication) Silicon Nanotechnology Metal Nanostructure Reactive-ion etching Optoelectronics Metallurgy

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Nanowire Synthesis and Applications

Physical Sciences → Engineering → Biomedical Engineering

Silicon Nanostructures and Photoluminescence

Physical Sciences → Materials Science → Materials Chemistry

Advancements in Semiconductor Devices and Circuit Design

Physical Sciences → Engineering → Electrical and Electronic Engineering

Vertical silicon nanostructures via metal-assisted chemical etching

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