Modeling and Characterization of Lamé-mode Microresonators Realized by UV-LIGA

Hicham Majjad; Jean‐René Coudevylle; Skandar Basrour; M. de Labachelerie

doi:10.1007/978-3-642-59497-7_71

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Modeling and Characterization of Lamé-mode Microresonators Realized by UV-LIGA

Hicham Majjad Jean‐René Coudevylle Skandar Basrour M. de Labachelerie

Year: 2001 Pages: 300-303

DOI: 10.1007/978-3-642-59497-7_71

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Keywords:

LIGA Microfabrication Finite element method Vibration Materials science Characterization (materials science) Mode (computer interface) Optics Electronic engineering Optoelectronics Mechanical engineering Acoustics Engineering Computer science Physics Nanotechnology Structural engineering

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Photonic and Optical Devices

Physical Sciences → Engineering → Electrical and Electronic Engineering

Mechanical and Optical Resonators

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Modeling and Characterization of Lamé-mode Microresonators Realized by UV-LIGA

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