Mechanical characterization of microgrippers realized by LIGA technique

Abstract

Metallic microgrippers, obtained by the LIGA technique, are studied. Design methods of such devices are presented and validated by the use of finite element analysis (FEA). Details on the fabrication process are also exposed. Experimental values of Young's modulus and residual stresses of electroformed nickel have been measured. These data are used to improve the previous FEA. Comparison between experiments and numerical predictions are finally discussed.