JOURNAL ARTICLE

A push-pull double-contact MEMS relay fabricated by MetalMUMPs process

Li-Feng WangYue Jin

Year: 2016 Journal:   Microsystem Technologies Vol: 23 (6)Pages: 2257-2262   Publisher: Springer Science+Business Media
Keywords:
Microelectromechanical systems Relay Contact resistance Actuator Voltage Electrical engineering Solid-state relay Fabrication Inductance Materials science Process (computing) Electrical contacts Optoelectronics Electronic engineering Engineering Computer science Nanotechnology Physics

Metrics

5
Cited By
0.48
FWCI (Field Weighted Citation Impact)
15
Refs
0.71
Citation Normalized Percentile
Is in top 1%
Is in top 10%

Citation History

Topics

Advanced MEMS and NEMS Technologies
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Force Microscopy Techniques and Applications
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Acoustic Wave Resonator Technologies
Physical Sciences →  Engineering →  Biomedical Engineering
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