A push-pull double-contact MEMS relay fabricated by MetalMUMPs process

Li-Feng Wang; Yue Jin

doi:10.1007/s00542-016-3001-5

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A push-pull double-contact MEMS relay fabricated by MetalMUMPs process

Li-Feng Wang Yue Jin

Year: 2016 Journal: Microsystem Technologies Vol: 23 (6)Pages: 2257-2262 Publisher: Springer Science+Business Media

DOI: 10.1007/s00542-016-3001-5

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Keywords:

Microelectromechanical systems Relay Contact resistance Actuator Voltage Electrical engineering Solid-state relay Fabrication Inductance Materials science Process (computing) Electrical contacts Optoelectronics Electronic engineering Engineering Computer science Nanotechnology Physics

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Advanced MEMS and NEMS Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Force Microscopy Techniques and Applications

Physical Sciences → Physics and Astronomy → Atomic and Molecular Physics, and Optics

Acoustic Wave Resonator Technologies

Physical Sciences → Engineering → Biomedical Engineering

A push-pull double-contact MEMS relay fabricated by MetalMUMPs process

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