JOURNAL ARTICLE

Ultra-High-Q Silica-on-Silicon Ridge-Ring-Resonator with an Integrated Silicon Nitride Waveguide

Abstract

A microcavity resonator having a Q factor exceeding 100 million and featuring a monolithic silicon nitride waveguide is demonstrated. This device enables full integration of ultra-high-Q resonators with other photonic components.

Keywords:
Resonator Materials science Silicon Optoelectronics Silicon nitride Q factor Silicon photonics Waveguide Hybrid silicon laser Photonics Nitride Optical ring resonators Ridge Integrated optics Layer (electronics) Nanotechnology

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0.94
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Citation History

Topics

Advanced Fiber Laser Technologies
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
Photonic and Optical Devices
Physical Sciences →  Engineering →  Electrical and Electronic Engineering
Mechanical and Optical Resonators
Physical Sciences →  Physics and Astronomy →  Atomic and Molecular Physics, and Optics
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