Crystallization of amorphous silicon film induced by a near-infrared femtosecond laser

Ye Dai; Min He; Xiaona Yan; Guohong Ma

doi:10.3724/sp.j.1010.2011.00202

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Crystallization of amorphous silicon film induced by a near-infrared femtosecond laser

Ye Dai Min He Xiaona Yan Guohong Ma

Year: 2012 Journal: JOURNAL OF INFRARED AND MILLIMETER WAVES Vol: 30 (3)Pages: 202-206 Publisher: Science Press

DOI: 10.3724/sp.j.1010.2011.00202

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Keywords:

Femtosecond Materials science Crystallization Amorphous silicon Laser Silicon Amorphous solid Infrared Optoelectronics Optics Crystalline silicon Chemical engineering Crystallography Chemistry Physics

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Crystallization of amorphous silicon film induced by a near-infrared femtosecond laser

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