Laser Chemical Vapor Deposition of Oriented and Nanostructured Films

Akihiko Ito

doi:10.2320/materia.52.525

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JOURNAL ARTICLE

Laser Chemical Vapor Deposition of Oriented and Nanostructured Films

Akihiko Ito

Year: 2013 Journal: Materia Japan Vol: 52 (11)Pages: 525-529 Publisher: Japan Institute of Metals

DOI: 10.2320/materia.52.525

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Abstract

．著者らは，気相中に発生させた強い光の場を，化学気相析出の反応場として利用し，結晶配向成長が顕著になることを見出した．さらに，従来の熱プロセスでは合成が難しいとされる複酸化物化合物や特異なナノ構造組織の生成を報告している．

Keywords:

Chemical vapor deposition Materials science Laser Chemical engineering Combustion chemical vapor deposition Nanotechnology Deposition (geology) Pulsed laser deposition Thin film Carbon film Optics Geology Engineering Physics

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Metal and Thin Film Mechanics

Physical Sciences → Engineering → Mechanics of Materials

Diamond and Carbon-based Materials Research

Physical Sciences → Materials Science → Materials Chemistry

Advanced Materials Characterization Techniques

Physical Sciences → Engineering → Biomedical Engineering

Laser Chemical Vapor Deposition of Oriented and Nanostructured Films

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