Determination of Optical Constants of Rough Hydrogenated Amorphous Silicon Thin Films

丁文革 Ding Wenge; 卢云霞 Lu Yunxia; 马登浩 Ma Denghao; 苑静 Yuan Jing; 侯玉斌 Hou Yubin; 于威 Yu Wei; 傅广生 Fu Guangsheng

doi:10.3788/aos201333.0331001

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Determination of Optical Constants of Rough Hydrogenated Amorphous Silicon Thin Films

丁文革 Ding Wenge 卢云霞 Lu Yunxia 马登浩 Ma Denghao 苑静 Yuan Jing 侯玉斌 Hou Yubin 于威 Yu Wei 傅广生 Fu Guangsheng

Year: 2013 Journal: Acta Optica Sinica Vol: 33 (3)Pages: 0331001-0331001

DOI: 10.3788/aos201333.0331001

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Keywords:

Amorphous silicon Materials science Amorphous solid Thin film Silicon Analytical Chemistry (journal) Optics Optoelectronics Nanotechnology Crystallography Chemistry Physics Crystalline silicon Organic chemistry

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Thin-Film Transistor Technologies

Physical Sciences → Engineering → Electrical and Electronic Engineering

Surface Roughness and Optical Measurements

Physical Sciences → Engineering → Computational Mechanics

Optical Polarization and Ellipsometry

Physical Sciences → Engineering → Biomedical Engineering

Determination of Optical Constants of Rough Hydrogenated Amorphous Silicon Thin Films

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