JOURNAL ARTICLE
Glow Discharge Produce Amorphous Sic:H Thin Films
N. T. TranD. J. OlsenRaghu PatelK. Epstein
Year: 1986 Journal: MRS Proceedings Vol: 70 Publisher: Cambridge University Press
Keywords:
Materials science Amorphous silicon Amorphous solid Glow discharge Silane Amorphous carbon Band gap Chemical engineering Analytical Chemistry (journal) Optoelectronics Silicon Composite material Plasma Crystallography Crystalline silicon Organic chemistry
Metrics
2
Cited By
0.92
FWCI (Field Weighted Citation Impact)
5
Refs
0.80
Citation Normalized Percentile
Is in top 1%
Is in top 10%
Topics
Thin-Film Transistor Technologies
Physical Sciences → Engineering → Electrical and Electronic Engineering
Transition Metal Oxide Nanomaterials
Physical Sciences → Materials Science → Polymers and Plastics
ZnO doping and properties
Physical Sciences → Materials Science → Materials Chemistry
Related Documents
JOURNAL ARTICLE
Electrical properties of glow discharge amorphous SiNx: H thin films
Hideo WatanabeKazuhisa KatohMasaru Yasui
Journal: Thin Solid Films Year: 1983 Vol: 106 (4)Pages: 263-274
JOURNAL ARTICLE
Preparation and characterization of amorphous SiC:H thin films
M.P. DelplanckeJames M. PowersG.J. VandentopMiquel SalmerónG.A. Somorjai
Journal: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films Year: 1991 Vol: 9 (3)Pages: 450-455
BOOK-CHAPTER
Amorphous Silicon Carbide Thin Films Produced in the Glow Discharge Deposition System
Springer proceedings in physics Year: 1989 Pages: 134-141
JOURNAL ARTICLE
Influence of microstructure on the photoconductivity of glow discharge deposited amorphous SiC:H and amorphous SiGe:H alloys
A. H. MahanP. RaboissonRaphael Tsu
Journal: Applied Physics Letters Year: 1987 Vol: 50 (6)Pages: 335-337
JOURNAL ARTICLE
Optical absorption in glow discharge amorphous silicon films
Journal: Thin Solid Films Year: 1979 Vol: 58 (2)Pages: 397-401